Electron beam writer investment project, Ebeam2

Photonics research in the Department of Physics and Mathematics at the University of Eastern Finland is based largely on the exploitation of interactions between light and micro- and nanostructures. The university has built clean-room laboratories for the fabrication of the structures in several stages since 1995 and acquired its first electron beam writer in 1997, which was replaced in 2006. These activities have created a photonics ecosystem in Joensuu that is significant on a European, even global, scale, where the electron beam writer is a vital piece of equipment for research and business.

The current electron beam writer will soon reach the age of 20 years. It is, therefore, reaching the end of its life cycle, and in recent years problems have arisen with the availability of spare parts. In addition, the maximum sample size of the current device, 150 mm, no longer corresponds to established industry standards.

Firstly, by renewing the electron beam writer, we can ensure the continuation of cutting-edge research and education in photonics. In addition, the new device has several advantages over the existing one. The new electron beam writers are designed for the industry-standard 200 mm sample size, allowing for larger and more components to be written on a single sample with even better resolution. Increased writing speeds make the system more efficient to use and allow for a larger sample size to be fully utilized.

In addition to the research, publishing, and educational benefits, the new electron beam writer will significantly support the national and international research and business cooperation of the University of Eastern Finland’s Center for Photonics Sciences. Ensuring the continuity of the manufacturing capability for micro- and nanophotonics components will also enable the development of education and training, thus improving the regional supply of skilled labour and significantly contributing to the attractiveness of photonics companies to grow and locate in Joensuu. In addition, the new electron beam writer will significantly improve regional competitiveness, R&D, innovation opportunities, and competitiveness of photonics companies through increased sample size, writing speed, and improved accuracy.

The project and related training, process development of electron beam lithography, and business development projects directly contribute to the smart specialization objectives of the North Karelia Regional Strategic Programme (POKAT 2025) for the continuity of business operations and growth and the conditions for new business creation based on research and innovation.